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Cambridge sf6 mixture Servicing in Gambia

Cambridge sf6 mixture Servicing in Gambia

Etch rates of Kapton H polyimide film in SF 6 - O 2 plasmas (0.25 torr) were studied as a function of the input gas mixture, the excitation frequency (25 kHz -450 kHz; 13.56 MHz) and the biasing mode.The treated surface was examined by X P S, SEM and contact angle measurement. The ion and neutral species of the plasma were sampled and analyzed by mass spectrometry.A proposed kinetic analysis of the etching mechanism is in good agreement with the experimental data.

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